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9780444521941

Comprehensive Microsystems

Comprehensive Microsystems
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Product details

  • ISBN-13: 9780444521941
  • ISBN: 0444521941
  • Publication Date: 2007
  • Publisher: Elsevier Science & Technology Books

AUTHOR

Gianchandani, Yogesh B., Tabata, Osamu, Zappe, Hans

SUMMARY

'Comprehensive Microsystems' is a reference work on Microelectromechanical Systems (MEMS). The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, integrated microsystems.Gianchandani, Yogesh B. is the author of 'Comprehensive Microsystems ', published 2007 under ISBN 9780444521941 and ISBN 0444521941.

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